Development of "Soft" Cleaning Chemistries for Enhanced STI Post-CMP Cleaning
Graverson, Carolyn F., Wortman-Otto, Katherine M., Linhart, Abigail N., Zubi, Tala B., Keleher, Jason J.
Published in ECS transactions (03.07.2019)
Published in ECS transactions (03.07.2019)
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Journal Article
Designing a Supramolecular Process for Post-STI CMP Cleaning
Graverson, Carolyn F., Zubi, Tala B., Keleher, Jason J.
Published in Meeting abstracts (Electrochemical Society) (01.09.2019)
Published in Meeting abstracts (Electrochemical Society) (01.09.2019)
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Journal Article
Probing the Effect of Point of Use Filtration on Cu CMP Slurry Health
Salinas, Maria G, Zubi, Tala B, Keleher, Jason J.
Published in Meeting abstracts (Electrochemical Society) (01.05.2019)
Published in Meeting abstracts (Electrochemical Society) (01.05.2019)
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Journal Article
Enhancing Post-Chemical Mechanical Planarization (CMP) Cleaning in the Presence of Polyelectrolyte-Based Chemistry Relevant to Shallow Trench Isolation
Mikos, Allie M, Graverson, Carolyn F, Zubi, Tala B, Keleher, Jason J.
Published in Meeting abstracts (Electrochemical Society) (01.05.2019)
Published in Meeting abstracts (Electrochemical Society) (01.05.2019)
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Journal Article
Probing the Interactions between CeO 2 Nanoparticles and Cleaning Chemistry Relevant to Post STI CMP Cleaning
Zubi, Tala B, Graverson, Carolyn F, Sherry, Brian M, Keleher, Jason J., Dickmann, Dan S, Her, Bob, Urban, Nathaniel D
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
Published in Meeting abstracts (Electrochemical Society) (13.04.2018)
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Journal Article