Cyclegan-Based Mask Diffraction Model
Zhuo, Jiaxiang, Xu, Dongyong, Shen, Yijiang
Published in 2023 China Semiconductor Technology International Conference (CSTIC) (26.06.2023)
Published in 2023 China Semiconductor Technology International Conference (CSTIC) (26.06.2023)
Get full text
Conference Proceeding
Gan-Based Fast Mask Near-Field Calculation
Shen, Yijiang, Jiao, Zhijie, Zhuo, Jiaxiang
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
Published in 2022 China Semiconductor Technology International Conference (CSTIC) (20.06.2022)
Get full text
Conference Proceeding