Patterning hot spot verification using high speed e-beam metrospection with D2DB at foundry high volume manufacturing environment
Wei, Fang, Zhang, Chenming, Meng, Honglin, Chu, Zhihao, Huang, Chao, Wu, Lin, Chen, Han, He, Daquan, Chen, Lulu, Jin, Donghan, Shi, Elly, Zhu, Robbin, Su, Shane, Wang, Pei, Zhang, Hong Wei, Chi, Kai Yuan, Zhu, Xuechen, Lin, Kolos, Lee, Peja, Chen, Selena, Elmalk, Abdalmohsen, Zhang, Andy, Liang, Leon
Published in 2021 International Workshop on Advanced Patterning Solutions (IWAPS) (12.12.2021)
Published in 2021 International Workshop on Advanced Patterning Solutions (IWAPS) (12.12.2021)
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Conference Proceeding
Dose control strategy using random logic device patterns and massive metrology in a foundry high volume manufacturing environment
Zhou, Kan, Guo, Xin, Bian, Yuyang, Zhou, Wenzhan, Zhang, Yu, van Mil, Ijen, Shi, Elly, Zhu, Robbin, Zhu, Jo, Mao, Ivan, Koolen, Elvira, Chi, Kaiyuan, Trinchant, Jose Carlos Font, Isai, Gratiela, Chen, Selena, Wang, Jing, Wang, Pei, Su, Shane, Zhu, Xuechen, Lin, Kolos, Pao, Kelvin, Thuijs, Koen, Lee, Peja, Elmalk, Abdalmohsen, Raghunathan, Sudharshanan, Zhang, Andy, Liang, Leon, Wang, Xander, Zhang, Gary
Published in 2021 International Workshop on Advanced Patterning Solutions (IWAPS) (12.12.2021)
Published in 2021 International Workshop on Advanced Patterning Solutions (IWAPS) (12.12.2021)
Get full text
Conference Proceeding