Improvement on the Gate Oxide Integrity Caused by the TUB Charges in SOI Technology
Ying Ying, Lesley Wong, Anak Tuloi, Charissa Antia, Pilkington, Steven John, Hun Jin, Ryan Lee, Zhong Hong, Desmond Lau
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
Published in 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (13.05.2024)
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