A High Sensitivity AlN-Based MEMS Hydrophone for Pipeline Leak Monitoring
Zhi, Baoyu, Wu, Zhipeng, Chen, Caihui, Chen, Minkan, Ding, Xiaoxia, Lou, Liang
Published in Micromachines (Basel) (14.03.2023)
Published in Micromachines (Basel) (14.03.2023)
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