Photoetching device and photoetching method
ZHENG BOZHONG, ZHANG JUNLIN, ZHANG HANLONG, LIU BAICUN, CHEN LIRUI, FU ZHONGQI
Year of Publication 03.03.2020
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Year of Publication 03.03.2020
Patent
Bridge cantilever construction hanging basket walking system and operation method
ZHENG BOZHONG, ZHU YIHUAN, XU JIE, FENG XIAO, LIU JIN, ZHU JINYING, LIU YUYU, FENG JINGCHEN, XUE XUTAO, QUE ZHENGYI, ZHANG QUNFENG, LI XIANG
Year of Publication 04.01.2022
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Year of Publication 04.01.2022
Patent
Method for detecting cleanliness of photoetching equipment and reflective photomask
ZHENG BOZHONG, LI ZONGYAN, GUO JUEQI, ZHENG JIEREN, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Laser system and lithographic apparatus
YI WEITING, ZHENG BOZHONG, ZHANG JUNLIN, LIU BAICUN, CHEN ZHENGHONG, CHEN LIRUI, FU ZHONGQI
Year of Publication 21.02.2020
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Year of Publication 21.02.2020
Patent
Device and method for cleaning light collection mirror of photoetching device
ZHENG BOZHONG, CHEN JIAZHEN, LUO SHAOWEI, ZHONG RENYANG, WU SHANGYING, CHEN LIRUI, JIAN SHANGJIE
Year of Publication 05.03.2019
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Year of Publication 05.03.2019
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Spraying nozzle module, and photoetching apparatus and operation method thereof
ZHENG BOZHONG, LAI WEIZHI, LIU BAICUN, WU SHANGYING, CHEN LIRUI, JIAN SHANGJIE
Year of Publication 01.01.2019
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Year of Publication 01.01.2019
Patent
Semiconductor wafer processing method and system and system cleaning method
LU MIN'AN, ZHENG BOZHONG, LI ZONGYAN, GUO JUEQI, XU ZHEZHANG, ZHOU JIAXIN, CHEN LIRUI, FU ZHONGQI
Year of Publication 26.03.2019
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Year of Publication 26.03.2019
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Semiconductor device, manufacturing method thereof, and measuring method of overlay error
ZENG YUNHENG, ZHENG BOZHONG, CHEN LONGYI, SU XIANGYU, FU SHIQI, WANG YUQING, CHEN GUISHUN, LIN XINQIN, ZHU JIAHONG, ZHANG QIKANG, CHEN KAIXIONG
Year of Publication 07.12.2018
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Year of Publication 07.12.2018
Patent