Multi-wafer 3C-SiC thin films grown on Si (100) in a vertical HWLPCVD reactor
Yan, Guoguo (果果 闫), Sun, Guosheng (国胜 孙), Wu, Hailei (海雷 吴), Wang, Lei (雷王), Zhao, Wanshun (万顺 赵), Liu, Xingfang (兴昉 刘), Zeng, Yiping (一平 曾), Wen, Jialiang (家良 温)
Published in Journal of semiconductors (01.06.2011)
Published in Journal of semiconductors (01.06.2011)
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