Fully Self-Aligned Amorphous-Silicon MUS Transistors
Okada, Hiroyuki, Uchida, Yasutaka, Zhang, Hongyon, Sugiura, Osamu, Matsumura, Masakiyo
Published in Japanese Journal of Applied Physics (01.09.1986)
Published in Japanese Journal of Applied Physics (01.09.1986)
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Journal Article
Fully self-aligned amorphous-silicon MOS transistors
OKADA, H, UCHIDA, Y, ZHANG, H, SUGIURA, O, MATSUMURA, M
Published in Japanese journal of applied physics (1986)
Published in Japanese journal of applied physics (1986)
Get full text
Journal Article