Topographic Complexities and Solutions for High Density BEOL MIM Capacitors
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Published in ECS transactions (01.08.2017)
Published in ECS transactions (01.08.2017)
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Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
Published in 2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) (01.05.2015)
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Impact of electrode surface modulation on time-dependent dielectric breakdown
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Published in 2015 IEEE International Reliability Physics Symposium (01.04.2015)
Published in 2015 IEEE International Reliability Physics Symposium (01.04.2015)
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Conference Proceeding
Topographic Complexities and Solutions for High Density BEOL MIM Capacitors
Cheng, Lili, Kakita, Shinichiro, Fox, Robert, Motoyama, Emiko, Lee, Jusang, Azad, Nabil, Hart, Gregory, Ham, Sun, Sharma, Ankur, Beaudoin, Felix, Zhang, Galor Wenyi, de la Garza, Ernesto Gene, Babighian, Pietro, Wang, Tao, Yang, Xiaoming, Augur, Rod, Tang, Teck Jung
Published in Meeting abstracts (Electrochemical Society) (01.09.2017)
Published in Meeting abstracts (Electrochemical Society) (01.09.2017)
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Journal Article