Copper interconnects with improved electromigration lifetime
WOO CHRISTY, BLISH RICHARD C, ZHAI JUN "CHARLIE", BESSER PAUL, HAU-RIEGE CHRISTINE, YIANG KOK-YONG
Year of Publication 13.05.2014
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Year of Publication 13.05.2014
Patent
Copper interconnects with improved electromigration lifetime
WOO CHRISTY, BLISH RICHARD C, ZHAI JUN "CHARLIE", BESSER PAUL, HAU-RIEGE CHRISTINE, YIANG KOK-YONG
Year of Publication 13.12.2007
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Year of Publication 13.12.2007
Patent
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