Cu/Airgap integration on 90nm Cu BEOL process platform
Xiaoxu Kang, Qingyun Zuo, Xinxue Wang, Shaohai Zeng, Shoumian Chen
Published in 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (01.10.2012)
Published in 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (01.10.2012)
Get full text
Conference Proceeding
In-Line Inspection on Thickness of Sputtered Thin Ta and TaN Films by Spectroscopic Ellipsometry
Yuan, Chao, Kang, Xiaoxu, Zuo, Qingyun, Zeng, Shaohai, Chen, Shoumian, Zhao, Yuhang
Published in ECS transactions (16.03.2012)
Published in ECS transactions (16.03.2012)
Get full text
Journal Article