A sub-nanometric three-axis surface encoder with short-period planar gratings for stage motion measurement
Kimura, Akihide, Gao, Wei, Kim, WooJae, Hosono, Koji, Shimizu, Yuki, Shi, Lei, Zeng, Lijiang
Published in Precision engineering (01.10.2012)
Published in Precision engineering (01.10.2012)
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Two-probe optical encoder for absolute positioning of precision stages by using an improved scale grating
Li, Xinghui, Wang, Huanhuan, Ni, Kai, Zhou, Qian, Mao, Xinyu, Zeng, Lijiang, Wang, Xiaohao, Xiao, Xiang
Published in Optics express (19.09.2016)
Published in Optics express (19.09.2016)
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Fabrication of gratings with low spacing error by the dual-beam exposure system with spherical lens
Shiwei Wang, Lijiang Zeng
Published in 2015 Conference on Lasers and Electro-Optics (CLEO) (01.05.2015)
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Published in 2015 Conference on Lasers and Electro-Optics (CLEO) (01.05.2015)
Conference Proceeding
Accurate measurement of orthogonality of equal-period, two-dimensional gratings by an interferometric method
Feng, Can, Kajima, Mariko, Gonda, Satoshi, Minoshima, Kaoru, Fujimoto, Hiroyuki, Zeng, Lijiang
Published in Metrologia (01.06.2012)
Published in Metrologia (01.06.2012)
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