Scaling properties of a Si surface patterned by selective chemical etching
Wisz, G., Gorbach, T.Ya, Smertenko, P.S., Blahut, A., Zembrowska, K., Kuzma, M.
Published in Superlattices and microstructures (01.07.2004)
Published in Superlattices and microstructures (01.07.2004)
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