Micromachined array-type Mirau interferometer for parallel inspection of MEMS
Albero, J, Bargiel, S, Passilly, N, Dannberg, P, Stumpf, M, Zeitner, U D, Rousselot, C, Gastinger, K, Gorecki, C
Published in Journal of micromechanics and microengineering (01.06.2011)
Published in Journal of micromechanics and microengineering (01.06.2011)
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Journal Article
Table-top high-energy 7 μm OPCPA and 260 mJ Ho:YLF pump laser
Elu, U, Steinle, T, Sánchez, D, Maidment, L, Zawilski, K, Schunemann, P, Zeitner, U D, Simon-Boisson, C, Biegert, J
Published in Optics letters (01.07.2019)
Published in Optics letters (01.07.2019)
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Journal Article
Twyman-Green-type integrated laser interferometer array for parallel MEMS testing
Oliva, M, Michaelis, D, Dannberg, P, Józwik, M, Li ewski, K, Kujawi ska, M, Zeitner, U D
Published in Journal of micromechanics and microengineering (01.01.2012)
Published in Journal of micromechanics and microengineering (01.01.2012)
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Journal Article
Femtosecond inscription of semi-aperiodic multi-notch fiber Bragg gratings using a phase mask
Goebel, T A, Heusinger, M, Krämer, R G, Matzdorf, C, Imogore, T O, Richter, D, Zeitner, U D, Nolte, S
Published in Optics express (23.11.2020)
Published in Optics express (23.11.2020)
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Journal Article
Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks
Weichelt, T, Vogler, U, Stuerzebecher, L, Voelkel, R, Zeitner, U D
Published in Optics express (30.06.2014)
Published in Optics express (30.06.2014)
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Journal Article
Folded diffractive laser resonators with user-defined fundamental mode
BÜTTNER, A, KOWARSCHIK, R, ZEITNER, U. D
Published in Applied physics. B, Lasers and optics (01.09.2005)
Published in Applied physics. B, Lasers and optics (01.09.2005)
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Journal Article
Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach
Oliva, M, Harzendorf, T, Michaelis, D, Zeitner, U D, Tünnermann, A
Published in Optics express (18.07.2011)
Published in Optics express (18.07.2011)
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Journal Article
Resolution enhancement for advanced mask aligner lithography using phase-shifting photomasks
Weichelt, T., Vogler, U., Stuerzebecher, L., Voelkel, R., Zeitner, U. D.
Published in Optics express (30.06.2014)
Published in Optics express (30.06.2014)
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Journal Article
Multilevel blazed gratings in resonance domain: an alternative to the classical fabrication approach
Oliva, M., Harzendorf, T., Michaelis, D., Zeitner, U. D., Tünnermann, A.
Published in Optics express (18.07.2011)
Published in Optics express (18.07.2011)
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Journal Article
Towards Hybrid Optical Components via Non-Planar Direct Bonding
Birckigt, P., Rothhardt, C., Risse, S., Zeitner, U. D.
Published in 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) (05.10.2021)
Published in 2021 7th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D) (05.10.2021)
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Conference Proceeding
Direct write grayscale lithography for arbitrary shaped micro-optical surfaces
Eckstein, H.-C, Stumpf, M., Schleicher, P., Kleinle, S., Matthes, A., Zeitner, U. D., Brauer, A.
Published in 2015 20th Microoptics Conference (MOC) (01.10.2015)
Published in 2015 20th Microoptics Conference (MOC) (01.10.2015)
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Conference Proceeding
Journal Article
External design freedom for optimization of resonator originated beam shaping
Zeitner, U.D., Wyrowski, F., Zellmer, H.
Published in IEEE journal of quantum electronics (01.10.2000)
Published in IEEE journal of quantum electronics (01.10.2000)
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Journal Article
Mode shaping for enhanced brightness in broad area lasers using monolithically integrated microoptical structures
Eckstein, H. C., Stumpf, M., Zeitner, U. D., Lauer, C., Bachmann, A., Furitsch, M.
Published in 2014 International Semiconductor Laser Conference (01.09.2014)
Published in 2014 International Semiconductor Laser Conference (01.09.2014)
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Conference Proceeding