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Incident ion energy spectrum and target sputtering rate in dc planar magnetron
by
Czekaj, D
,
Goranchev, B
,
Hollmann, EK
,
Volpyas, VA
,
Zaytsev
,
AG
Published in
Vacuum
(1991)
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applied sciences
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physics
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materials science
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materials science, multidisciplinary
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physical sciences
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