Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Rouabah, Hamza A, Park, Benjamin Y, Zaouk, Rabih B, Morgan, Hywel, Madou, Marc J, Green, Nicolas G
Published in Journal of micromechanics and microengineering (01.03.2011)
Published in Journal of micromechanics and microengineering (01.03.2011)
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