Three-degree-of-freedom planar flexible mechanism for precise positioning of wafer and micropositioner
ZHANG JIE, YANG GUILIN, QIAN CHEN, YUAN LIMING, CHEN SILU, FANG ZAOJUN, ZHANG CHI
Year of Publication 16.08.2024
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Year of Publication 16.08.2024
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Three-station double-workpiece table of photoetching machine
ZHANG JIE, YANG GUILIN, QIAN CHEN, YUAN LIMING, CHEN SILU, FANG ZAOJUN, ZHANG CHI
Year of Publication 26.07.2024
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Year of Publication 26.07.2024
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Plane rotating mechanism for wafer photoetching, micropositioner and macro-micro motion platform
ZHANG JIE, YANG GUILIN, YUAN LIMING, CHEN SILU, FANG ZAOJUN, ZHANG CHI
Year of Publication 05.01.2024
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Year of Publication 05.01.2024
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Positioning method and system based on acceleration sensor
CHEN QINGYING, YU QUANLIN, ZHENG TIANJIANG, SHENG LIUBING, LIU QIANG, YANG GUILIN, FANG ZAOJUN
Year of Publication 12.05.2023
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Year of Publication 12.05.2023
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Collaborative robot assembly control system and method based on dual-vision detection
DAI YINING, LIU TONGJIAN, FANG ZAOJUN, LIAN HONGYUAN, ZHANG CHI, PAN CONG
Year of Publication 09.05.2023
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Year of Publication 09.05.2023
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