A highly reliable 3-D integrated SBT ferroelectric capacitor enabling FeRAM scaling
Goux, L., Russo, G., Menou, N., Lisoni, J.G., Schwitters, M., Paraschiv, V., Maes, D., Artoni, C., Corallo, G., Haspeslagh, L., Wouters, D.J., Zambrano, R., Muller, C.
Published in IEEE transactions on electron devices (01.04.2005)
Published in IEEE transactions on electron devices (01.04.2005)
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