DC Bias Effects on Optimizing ScAlN Air-Coupled pMUT Performance Parameters
Choong, D. S. W., Goh, D. J., Liu, J., Sarafianou, M., Merugu, S., Zhang, Q. X., Chang, P., Leotti, A., Koppisetti, G., Zakiyyan, N., Lin, H., Bhasetti, C., Ghosh, S., Ramegowda, P. C., Chen, D. S.-H., Lee, J. E.-Y., Prelini, C., Giusti, D., Savoia, A., K, Yul
Published in 2023 IEEE SENSORS (29.10.2023)
Published in 2023 IEEE SENSORS (29.10.2023)
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