Device for the precise shape correction of optical surfaces by ion-beam and reactive plasma etching
Zabrodin, I. G., Zakalov, B. A., Kas’kov, I. A., Pestov, A. E., Salashchenko, N. N., Chkhalo, N. I.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.09.2013)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.09.2013)
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Journal Article
Apparatus for the magnetron and ion-beam synthesis of multilayer structures
Zabrodin, I. G., Zakalov, B. A., Kas’kov, I. A., Klyuenkov, E. B., Polkovnikov, V. N., Salashchenko, N. N., Starikov, S. D., Suslov, L. A.
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2013)
Published in Surface investigation, x-ray, synchrotron and neutron techniques (01.07.2013)
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Journal Article
A stand for a projection EUV nanolithographer-multiplicator with a design resolution of 30 nm
Volgunov, D. G., Zabrodin, I. G., Zakalov, B. A., Zuev, S. Yu, Kas’kov, I. A., Kluenkov, E. B., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Suslov, L. A., Toropov, M. N., Chkhalo, N. I.
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
Published in Bulletin of the Russian Academy of Sciences. Physics (2011)
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Journal Article