Effect of In 0.53 Ga 0.47 As Surface Nitridation on Electrical Characteristics of High-k/ Capacitors
Suzuki, Yuya, Zadeh, Daryoush H., Kakushima, Kuniyuki, Ahmet, Parhat, Kataoka, Yoshinori, Nishiyama, Akira, Sugii, Nobuyuki, Tsutsui, Kazuo, Natori, Kenji, Hattori, Takeo, Iwai, H.
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
Get full text
Journal Article
Effect of In0.53Ga0.47As Surface Nitridation on Electrical Characteristics of High-k/ Capacitors
Suzuki, Yuya, Zadeh, Daryoush H., Kakushima, Kuniyuki, Ahmet, Parhat, Kataoka, Yoshinori, Nishiyama, Akira, Sugii, Nobuyuki, Tsutsui, Kazuo, Natori, Kenji, Hattori, Takeo, Iwai, H.
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
Get full text
Journal Article