Enhancement of thermal atomic layer etching
Abdulagatov, Aziz, Marquardt, Amy Elizabeth, Johnson, Nicholas Ray, Dumont, Jaime Willadean, Lee, Younghee, George, Steven McClellan, Zywotko, David Richard
Year of Publication 29.09.2020
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Year of Publication 29.09.2020
Patent
Enhancement of Thermal Atomic Layer Etching
ABDULAGATOV, AZIZ, ZYWOTKO, DAVID RICHARD, GEORGE, STEVEN MCCLELLAN, DUMONT, JAIME WILLADEAN, JOHNSON, NICHOLAS RAY, MARQUARDT, AMY ELIZABETH, LEE, YOUNGHEE
Year of Publication 21.02.2019
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Year of Publication 21.02.2019
Patent
ENHANCEMENT OF THERMAL ATOMIC LAYER ETCHING
JOHNSON, Nicholas Ray, LEE, Younghee, MARQUARDT, Amy Elizabeth, ZYWOTKO, David Richard, DUMONT, Jaime Willadean, GEORGE, Steven McClellan
Year of Publication 08.03.2018
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Year of Publication 08.03.2018
Patent
ENHANCEMENT OF THERMAL ATOMIC LAYER ETCHING
JOHNSON, Nicholas Ray, LEE, Younghee, MARQUARDT, Amy Elizabeth, ZYWOTKO, David Richard, DUMONT, Jaime Willadean, GEORGE, Steven McClellan
Year of Publication 14.12.2017
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Year of Publication 14.12.2017
Patent