MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DATA LOGGING
SMIRNOV ALEXEI V, ALBRIGHT PATRICK, JORDAN CY, NAGARAJAN ARUN, ZOLOCK MICHAEL J, JOHNSON RYAN, FERNANDEZ ALEXANDER
Year of Publication 15.01.2014
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Year of Publication 15.01.2014
Patent
Mass flow controller with onboard diagnostics, prognostics, and data logging
Nagarajan Arun, Zolock Michael J, Smirnov Alexei V, Johnson Ryan, Jordan Cy, Fernandez Alexander, Albright Patrick
Year of Publication 19.09.2017
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Year of Publication 19.09.2017
Patent
MASS FLOW CONTROLLER WITH ONBOARD DIAGNOSTICS, PROGNOSTICS, AND DATA LOGGING
SMIRNOV ALEXEI V, ALBRIGHT PATRICK, JORDAN CY, NAGARAJAN ARUN, ZOLOCK MICHAEL J, JOHNSON RYAN, FERNANDEZ ALEXANDER
Year of Publication 19.05.2016
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Year of Publication 19.05.2016
Patent
Mass flow controller with onboard diagnostics, prognostics, and data logging
SMIRNOV ALEXEI V, ALBRIGHT PATRICK, JORDAN CY, NAGARAJAN ARUN, ZOLOCK MICHAEL J, JOHNSON RYAN, FERNANDEZ ALEXANDER
Year of Publication 09.02.2016
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Year of Publication 09.02.2016
Patent