Preparation method of MEMS device containing paper folding structure
LIANG GUANGHUA, XU YAXIN, WANG KANG, ZHAO FEI, LIU XIAOLAN, ZHUANG ZHIXUE, ZHOU YONGHUA
Year of Publication 02.07.2024
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Year of Publication 02.07.2024
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Preparation method of composite metal sacrificial layer of MEMS device
LIANG GUANGHUA, XU YAXIN, ZHAO FEI, LIU XIAOLAN, ZHUANG ZHIXUE, GONG MENGLEI
Year of Publication 13.07.2021
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Year of Publication 13.07.2021
Patent
Preparation method of multi-layer precision thin film circuit on surface of LTCC substrate with cavity
LIANG GUANGHUA, XU YAXIN, LU HUIXIANG, WANG KANG, ZHAO FEI, LIU XIAOLAN, DUAN LONGFAN, ZHUANG ZHIXUE
Year of Publication 13.07.2021
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Year of Publication 13.07.2021
Patent
LTCC substrate cavity temporary filling mixed glue and filling method
LIANG GUANGHUA, TANG XIAOPING, XU YAXIN, CHEN YU, YAN YINGZHAN, LU HUIXIANG, LIU XIAOLAN, ZHUANG ZHIXUE, DANG YUANLAN
Year of Publication 08.05.2020
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Year of Publication 08.05.2020
Patent
Preparation method of sandwich type photoresist sacrificial layer
LIANG GUANGHUA, XU YAXIN, CHEN YU, LIU XIAOLAN, DANG YUANLAN, ZHUANG ZHIXUE
Year of Publication 01.06.2018
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Year of Publication 01.06.2018
Patent
A TSV hole filling method
XU YAXIN, JIA SHIWANG, ZHAO FEI, LIU XIAOLAN, DANG YUANLAN, ZHUANG ZHIXUE, GONG MENGLEI, ZHOU YONGHUA
Year of Publication 25.01.2019
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Year of Publication 25.01.2019
Patent
Local blind stifled shutoff body of underground high water head hole room crowd's concrete
YU CHANGZHENG, QI ZHIJIAN, JIANG DIANCHENG, HAN LIYANG, LIU HAIFU, YANG CHENGZHU, CAI GUANGZHE, XU HUAIJU, WANG HE, HUANG XIANGJUN, SHI YOUFU, WANG FUYUN, LU ZHENGANG, WANG TIEFENG, XIONG LING, SU JIALIN, LIN GANG, FENG JIXIN, SHI GUANGYU, ZHUANG ZHIXUE
Year of Publication 28.10.2015
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Year of Publication 28.10.2015
Patent
Mask plate and preparation method of optical waveguide reflecting surface and optical waveguide
LIANG GUANGHUA, ZHANG YING, XU YAXIN, CHEN YU, ZHAO FEI, LIU XIAOLAN, XIAO YUANMING, DANG YUANLAN, ZHUANG ZHIXUE, LU LIDONG
Year of Publication 15.06.2018
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Year of Publication 15.06.2018
Patent
LCP base material RF MEMS switch preparation method
XING BOLUN, HE CHAO, ZHAO FEI, LIU YING, LIU XIAOLAN, LIANG GUANGHUA, LI CHAO, TANG XIAOPING, XU YAXIN, CHEN YU, LIU ZHIBIN, DANG YUANLAN, ZHUANG ZHIXUE, LI KE, GONG MENGLEI, ZHOU YONGHUA
Year of Publication 13.07.2016
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Year of Publication 13.07.2016
Patent