CAPACITOR STRUCTURE AND METHOD OF FORMING A CAPACITOR STRUCTURE
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Year of Publication 10.09.2004
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AVOIDING SHORTING IN CAPACITORS
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Year of Publication 02.09.2004
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Year of Publication 02.09.2004
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AVOIDING SHORTING IN CAPACITORS
ZHUANG HAOREN, HORNIK KARL, LIAN JINGYU, BEITEL GERHARD, EGGER ULRICH
Year of Publication 02.09.2004
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Year of Publication 02.09.2004
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HARDMASK WITH HIGH SELECTIVITY FOR IR BARRIERS FOR FERROELECTRIC CAPACITOR MANUFACTURING
KUMURA, YOSHINORI, TOMIOKA, KAZUHIRO, EGGER, ULRICH, KANAYA, HIROYUKI, ZHUANG, HAOREN
Year of Publication 12.08.2004
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Year of Publication 12.08.2004
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Hardmask with high selectivity for Ir barriers for ferroelectic capacitor manufacturing
Egger, Ulrich, Zhuang, Haoren, Kumura, Yoshinori, Tomioka, Kazuhiro, Kanaya, Hiroyuki
Year of Publication 05.08.2004
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Year of Publication 05.08.2004
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Hardmask with high selectivity for Ir barriers for ferroelectic capacitor manufacturing
ZHUANG HAOREN, KUMURA YOSHINORI, TOMIOKA KAZUHIRO, KANAYA HIROYUKI, EGGER ULRICH
Year of Publication 05.08.2004
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Year of Publication 05.08.2004
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Method for forming ferrocapacitors and FeRAM devices
Zhuang, Haoren, Egger, Ulrich, Bruchhaus, Rainer, Hornik, Karl, Lian, Jenny, Gernhardt, Stefan
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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Method for forming ferrocapacitors and FeRAM devices
ZHUANG HAOREN, HORNIK KARL, GERNHARDT STEFAN, BRUCHHAUS RAINER, EGGER ULRICH, LIAN JENNY
Year of Publication 08.01.2008
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Year of Publication 08.01.2008
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Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas
Chang, Chong Kwang, Zhuang, Haoren, Lipinski, Matthias, Mishra, Shailendra, Kwon, O Sung, Tjoa, Tjin Tjin, Ko, Young Gun
Year of Publication 02.06.2009
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Year of Publication 02.06.2009
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Methods of fabricating integrated circuit transistors by simultaneously removing a photoresist layer and a carbon-containing layer on different active areas
ZHUANG HAOREN, CHANG CHONG KWANG, LIPINSKI MATTHIAS, TJOA TJIN TJIN, MISHRA SHAILENDRA, KO YOUNG GUN, KWON O SUNG
Year of Publication 02.06.2009
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Year of Publication 02.06.2009
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Device for inhibiting hydrogen damage in ferroelectric capacitor devices
HORNIK KARL, ZHUANG HAOREN, MOON BUM-KI, HILLIGER ANDREAS, EGGER ULRICH, LIAN JENNY
Year of Publication 04.07.2006
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Year of Publication 04.07.2006
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