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ZHUANG HAOREN, LIPINSKI MATTHIAS, GUTMANN ALOIS, LIAN JINGYU, SARMA CHANDRASEKHAR
Year of Publication 02.08.2007
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Year of Publication 02.08.2007
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METHOD FOR FORMING FERROCAPACITORS AND FERAM DEVICES
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Year of Publication 14.06.2006
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Year of Publication 14.06.2006
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Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing
ZHUANG HAOREN, KUMURA YOSHINORU, TOMIOKA KAZUHIRO, KANAYA HIROYUKI, EGGER ULRICH
Year of Publication 16.05.2006
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Year of Publication 16.05.2006
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Hardmask with high selectivity for Ir barriers for ferroelectric capacitor manufacturing
Egger, Ulrich, Zhuang, Haoren, Kumura, Yoshinoru, Tomioka, Kazuhiro, Kanaya, Hiroyuki
Year of Publication 16.05.2006
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Year of Publication 16.05.2006
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Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing
ZHUANG HAOREN, CHANG CHONG KWANG, MISHRA SHAILENDRA, LIPINSKY MATTHIAS, TSOU LEN YUAN, PARK WAN JAE
Year of Publication 02.06.2009
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Year of Publication 02.06.2009
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Methods of forming mask patterns on semiconductor wafers that compensate for nonuniform center-to-edge etch rates during photolithographic processing
Chang, Chong Kwang, Park, Wan Jae, Tsou, Len Yuan, Zhuang, Haoren, Lipinsky, Matthias, Mishra, Shailendra
Year of Publication 02.06.2009
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Year of Publication 02.06.2009
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Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method
Zhuang, Haoren, Egger, Ulrich, Lian, Jingyu, Gernhardt, Stefan, Kanaya, Hiroyuki
Year of Publication 21.02.2006
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Year of Publication 21.02.2006
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Method of fabrication of an FeRAM capacitor and an FeRAM capacitor formed by the method
ZHUANG HAOREN, LIAN JINGYU, GERNHARDT STEFAN, KANAYA HIROYUKI, EGGER ULRICH
Year of Publication 21.02.2006
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Year of Publication 21.02.2006
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Lithography Masks and Methods of Manufacture Thereof
ZHUANG HAOREN, LIPINSKI MATTHIAS, GUTMANN ALOIS, MAROKKEY SAJAN, HAFFNER HENNING, SARMA CHANDRASEKHAR
Year of Publication 22.01.2009
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Year of Publication 22.01.2009
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