Structural Design and Simulation of a Multi-Channel and Dual Working Condition Wafer Defect Inspection Prototype
Ding, Ruizhe, Luo, Haiyan, Li, Zhiwei, Zhou, Zuoda, Qu, Dingjun, Xiong, Wei
Published in Micromachines (Basel) (01.08.2023)
Published in Micromachines (Basel) (01.08.2023)
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Journal Article
Wafer Eccentricity Deviation Measurement Method Based on Line-Scanning Chromatic Confocal 3D Profiler
Qu, Dingjun, Zhou, Zuoda, Li, Zhiwei, Ding, Ruizhe, Jin, Wei, Luo, Haiyan, Xiong, Wei
Published in Photonics (01.04.2023)
Published in Photonics (01.04.2023)
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Journal Article
A novel wafer defocus measurement method for spot-scanning imaging system using laser triangulation
Zhou, Zuoda, Qu, Dingjun, Ding, Ruizhe, Luo, Haiyan, Xiong, Wei, Li, Zhiwei, Jin, Wei, Ru, Yu, Jia, Shihao, Hong, Jin
Published in Measurement science & technology (31.01.2025)
Published in Measurement science & technology (31.01.2025)
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Journal Article
Characterization of Multimodal Spot Scanning Imaging System for Wafer Defect Inspection
Zhou, Zuoda, Luo, Haiyan, Xiong, Wei, Qu, Dingjun, Ding, Ruizhe, Li, Zhiwei, Jin, Wei, Ru, Yu, Jia, Shihao, Hong, Jin
Published in IEEE transactions on semiconductor manufacturing (14.10.2024)
Published in IEEE transactions on semiconductor manufacturing (14.10.2024)
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Journal Article
Spot scanning imaging calibration method based on deviation model for wafer inspection
Qu, Dingjun, Zhou, Zuoda, Li, Zhiwei, Ding, Ruizhe, Jin, Wei, Ru, Yu, Zhu, Xiahanxiao, Luo, Haiyan, Xiong, Wei
Published in Physica scripta (01.06.2024)
Published in Physica scripta (01.06.2024)
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Journal Article
Full-flow surface defect identification method based on spot scanning scattering for unpatterned wafer
Qu, Dingjun, Zhou, Zuoda, Li, Zhiwei, Ding, Ruizhe, Jin, Wei, Ru, Yu, Luo, Haiyan, Xiong, Wei
Published in Journal of instrumentation (01.01.2024)
Published in Journal of instrumentation (01.01.2024)
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Journal Article
Wafer bearing system of wafer defect detection device
LUO HAIYAN, DING RUIZHE, XIONG WEI, JIN WEI, QU DINGJUN, ZHOU ZUODA, LI ZHIWEI
Year of Publication 30.05.2023
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Year of Publication 30.05.2023
Patent
Wafer surface defect detection device and method
LUO HAIYAN, DING RUIZHE, XIONG WEI, JIN WEI, QU DINGJUN, ZHOU ZUODA, LI ZHIWEI, HONG JIN
Year of Publication 09.08.2022
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Year of Publication 09.08.2022
Patent
Wafer detection device and method, computer readable storage medium and electronic equipment
LUO HAIYAN, DING RUIZHE, XIONG WEI, WEI LAI, JIN WEI, QU DINGJUN, ZHOU ZUODA, LI ZHIWEI, HONG JIN
Year of Publication 02.05.2023
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Year of Publication 02.05.2023
Patent