Influence of pre-polishing process on site flatness values of polished wafers
Zhong, Genghang, Ning, Yongduo, Zhou, Qigang, Bian, Yongzhi, Wang, Xin, Qu, Xiang, Wang, Lei, Zhao, Erjing
Published in Materials science in semiconductor processing (01.09.2017)
Published in Materials science in semiconductor processing (01.09.2017)
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Method for treating laser marking damage of silicon substrate
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Year of Publication 23.07.2024
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Method for improving surface appearance and surface flatness of wafer after single-side polishing
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Method for preparing silicon substrate with ultrahigh resistivity by Czochralski method
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Year of Publication 09.06.2023
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BIAN YONGZHI, XU JIPING, CHENG FENGLING, ZHENG YU, NING YONGDUO, ZHONG GENGHANG
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
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Preparation method of silicon-based silicon dioxide back sealing film
BIAN YONGZHI, XU JIPING, SHI XUNDA, CAI LIYAN, NING YONGDUO, ZHONG GENGHANG, BAI XUE, LU JINJUN
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
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Method for reducing stress of silicon-based back-sealing polished wafer
BIAN YONGZHI, ZHAO JIANGWEI, XU JIPING, SHI XUNDA, NING YONGDUO, ZHONG GENGHANG, BAI XUE, CHEN LUFENG
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
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Preparation method of silicon substrate polished wafer for bonding process
HAN PING, BIAN YONGZHI, WANG XIN, ZHU XIAOTONG, XU JIPING, LI JUNHONG, LIN LIN, YAN JUNYAO, ZHANG JIANHUA, NING YONGDUO, ZHONG GENGHANG, TIAN FENGGE
Year of Publication 15.04.2022
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Year of Publication 15.04.2022
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Orifice detection and alarm device for APCVD back sealing furnace
CHEN XIN, WU DI, ZHANG XIBIAO, DENG JIANZHONG, ZHAO JING, JIANG ZHENHU, LIU HAN, ZHONG GENGHANG, ZOU YAHUI
Year of Publication 18.06.2021
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Year of Publication 18.06.2021
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Cooling device and method for silicon wafer oxygen donor elimination heat treatment process
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Year of Publication 04.05.2021
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Year of Publication 04.05.2021
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Preparation method of silicon substrate polished wafer for IGBT
BIAN YONGZHI, XU JIPING, LI JUNHONG, YAN JUNYAO, CUI BIN, LI YINGTAO, ZHANG JIANHUA, CHENG FENGLING, NING YONGDUO, ZHONG GENGHANG, LIAN QINGWEI
Year of Publication 30.04.2021
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Year of Publication 30.04.2021
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Acid corrosion processing method of large-diameter substrate wafer suitable for single-side polishing
BIAN YONGZHI, ZHANG LIANG, XU JIPING, LU LIYAN, CHENG FENGLING, ZHENG YU, NING YONGDUO, ZHONG GENGHANG
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
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Device and method for removing surface damage of wafer by alkali corrosion
BIAN YONGZHI, LIU ZUOXING, XU JIPING, LU LIYAN, CHENG FENGLING, NING YONGDUO, ZHONG GENGHANG, CHEN HE
Year of Publication 09.06.2020
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Year of Publication 09.06.2020
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