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Published in NeuroImage (Orlando, Fla.) (15.02.2024)
Published in NeuroImage (Orlando, Fla.) (15.02.2024)
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Development, characterization and integration of a novel boron nitride process for application as a Cu diffusion barrier
Yi Chen, Spuller, Matthew, Balseanu, Mihaela, Zhenjiang Cui, Naik, Mehul, Li-Qun Xia
Published in 2010 IEEE International Interconnect Technology Conference (01.06.2010)
Published in 2010 IEEE International Interconnect Technology Conference (01.06.2010)
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Conference Proceeding
UV Curing Effects on Glass Structure and Mechanical Properties of Organosilicate Low-k Thin Films
Gage, D.M., Guyer, E.P., Stebbins, J.F., Zhenjiang Cui, Amir Al-Bayati, Demos, A., MacWilliams, K.P., Dauskardt, R.H.
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Published in 2006 International Interconnect Technology Conference (2006)
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Conference Proceeding
Novel Hardmask for Sub-20nm Copper/Low K Backend Dual Damascene Integration
Xia, Li-Qun, Cui, Zhenjiang, Balseanu, Mihaela, Nguyen, Victor, Zhou, Kevin, Pender, Jeremiah, Naik, Mehul
Published in ECS transactions (01.01.2011)
Published in ECS transactions (01.01.2011)
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Journal Article