Furnace pressure control system for heavily phosphorus-doped single crystal furnace
CHENG JIANGUO, ZHENG TIEBO, FAN SONGJIE, WANG TIJUN, NIU PENGJU, LIANG XINGBO, LI BIN, YAN JINTANG, GONG YIFENG, WANG SHAOHUI
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
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Seed chuck used for growth of czochralski silicon singlecrystal
CHENG JIANGUO, TIAN DAXI, ZHENG TIEBO, ZHANG XIANGCHENG, LI GANG, HE YONGZENG
Year of Publication 09.01.2013
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Year of Publication 09.01.2013
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Seed chuck used for growth of czochralski silicon single-crystal
CHENG JIANGUO, TIAN DAXI, ZHENG TIEBO, ZHANG XIANGCHENG, LI GANG, HE YONGZENG
Year of Publication 13.06.2012
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Year of Publication 13.06.2012
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