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Apparatus and process for deposition of thin film on semiconductor substrate while inhibiting particle formation and deposition
by
CATABAY; WILBUR C
,
LEE; MING-YI
,
ZHANG
;
KAIJUN LEO
Year of Publication
03.10.2000
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Patent
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chemistry
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basic electric elements
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chemical surface treatment
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chemistry
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coating material with metallic material
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coating metallic material
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diffusion treatment of metallic material
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esp@cenet
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