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Published in ACS applied materials & interfaces (13.07.2022)
Published in ACS applied materials & interfaces (13.07.2022)
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Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral-photoinhibition lithography
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Published in Advanced photonics (01.11.2022)
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Direct laser writing breaking diffraction barrier based on two-focus parallel peripheral photoinhibition lithography (Erratum)
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Published in Advanced photonics (01.09.2023)
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High-speed and high-precision alignment laser direct writing photoetching method and device
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