METHOD FOR CALIBRATING A PYROMETER, METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER AND SYSTEM FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER
SCHENK TOBIAS, ZETTLER JOERG THOMAS, HENNINGER BERND, UREDAT STEFFEN, BINETTI MARCELLO, ZILIAN JENS, HABERLAND KOLJA
Year of Publication 22.11.2010
Get full text
Year of Publication 22.11.2010
Patent
Method for calibrating a two-wavelength pyrometer, method for determining the temperature of a semiconducting wafer and a system for determining the temperature of a semiconducting wafer
Kaspari, Christian, Zettler, Joerg-Thomas, Cornwell, David William, Nash, James Henry, Haberland, Kolja Lutz
Year of Publication 16.09.2020
Get full text
Year of Publication 16.09.2020
Patent