Search Results - "ZENG SHAOHAI" :: K.UTB vyhledávací portál | TBU Library Retrieval Portal

Deep trench isolation for substrate back surface leading-out and preparation method thereof

Deep trench isolation for substrate back surface leading-out and preparation method thereof

by ZENG SHAOHAI, LI MING, LIU ZHUNHUA
Year of Publication 17.04.2020

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Patent

Inclined hole forming method

Inclined hole forming method

by YI CHUNYAN, ZENG SHAOHAI, LI MING
Year of Publication 24.03.2020

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Patent

The study of overlay mark in self aligned double patterning and solution

The study of overlay mark in self aligned double patterning and solution

by Yao, Shuxin, Dong, Xianguo, Yuan, Wei, Hu, Hongmei, Lu, Yifei, Zeng, Shaohai, Yi, Chunyan, Li, Ming, Yang, Zhengkai, Wang, Wuping, Gan, Zhifeng, Zhang, Liang, Chong, Ermin, Mao, Zhibiao, Zhang, Yu
Published in 2015 China Semiconductor Technology International Conference (01.03.2015)

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Conference Proceeding Journal Article

Device and method for reducing epitaxial autodoping effect

Device and method for reducing epitaxial autodoping effect

by WANG JUNFENG, ZENG SHAOHAI, LI MING
Year of Publication 10.09.2019

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Patent

Copper interconnection structure and manufacturing method thereof

Copper interconnection structure and manufacturing method thereof

by ZENG SHAOHAI, LI MING
Year of Publication 17.10.2017

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Patent

Preparation method for high-compressive stress silicon nitride thin film

Preparation method for high-compressive stress silicon nitride thin film

by ZENG SHAOHAI, ZUO QINGYUN
Year of Publication 04.09.2013

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Patent

Fabrication method of FinFET side wall

Fabrication method of FinFET side wall

by ZENG SHAOHAI, LI MING, ZUO QINGYUN
Year of Publication 09.04.2019

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Patent

Method for reducing fin loss in FinFET sidewall etching

Method for reducing fin loss in FinFET sidewall etching

by HUANG RENDONG, ZENG SHAOHAI, ZUO QINGYUN, LI MING
Year of Publication 05.04.2019

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Patent

A method for forming shallow trench isolation

A method for forming shallow trench isolation

by ZENG SHAOHAI, ZUO QINGYUN, LI MING
Year of Publication 05.04.2019

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Patent

Heating device and heating method for high temperature ion implantation

Heating device and heating method for high temperature ion implantation

by XIA LIANG, ZENG SHAOHAI, LI MING
Year of Publication 01.01.2019

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Patent

Formation method of fin type field effect transistor structure

Formation method of fin type field effect transistor structure

by ZENG SHAOHAI, LI MING, CHEN ZHANGFA
Year of Publication 20.11.2018

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Patent

Formation method of finned field-effect transistor structure

Formation method of finned field-effect transistor structure

by ZENG SHAOHAI, LI MING, CHEN ZHANGFA
Year of Publication 06.11.2018

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Patent

Device and method for detecting roughness of inner wall of pipeline

Device and method for detecting roughness of inner wall of pipeline

by ZENG SHAOHAI, LIU ZHUNHUA, LI MING
Year of Publication 19.10.2018

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Patent

Method for measuring roughness of semiconductor fins

Method for measuring roughness of semiconductor fins

by HUANG RENDONG, ZENG SHAOHAI, ZUO QINGYUN, LI MING
Year of Publication 18.09.2018

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Patent

Device and method for detecting particles in pipeline

Device and method for detecting particles in pipeline

by ZENG SHAOHAI, LIU ZHUNHUA, LI MING
Year of Publication 04.09.2018

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Patent

Forming method for fully-depleted insulation layer silicon transistor

Forming method for fully-depleted insulation layer silicon transistor

by ZENG SHAOHAI, LI MING
Year of Publication 07.09.2016

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Patent

Method of manufacturing fin part of fin-type field effect transistor

Method of manufacturing fin part of fin-type field effect transistor

by YI CHUNYAN, YAO SHUXIN, ZENG SHAOHAI, LI MING
Year of Publication 04.02.2015

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Patent

Method for preventing high-K material oxygen diffusion

Method for preventing high-K material oxygen diffusion

by ZENG SHAOHAI, LI MING
Year of Publication 11.05.2016

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Patent

Novel SOI (silicon on insulator) material and preparation method thereof

Novel SOI (silicon on insulator) material and preparation method thereof

by ZENG SHAOHAI, ZUO QINGYUN
Year of Publication 19.10.2011

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Patent

Passivation layer and production method thereof

Passivation layer and production method thereof

by ZENG SHAOHAI, ZHANG WEI
Year of Publication 16.02.2011

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Patent

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