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JANSSEN PAUL, VAN DE KERKHOF MARCUS ADRIANUS, NIHTIANOV STOYAN, ZDRAVKOV ALEXANDAR NIKOLOV, VAN ZWOL PIETER JAN, MOHAMMADI VAHID
Year of Publication 11.03.2020
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Year of Publication 11.03.2020
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EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 16.02.2023
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Year of Publication 16.02.2023
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The pellicle and pellicle assembly
MEIJER MARCEL PETER, PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ZDRAVKOV ALEXANDAR NIKOLOV, KNAPEN PETER SIMON ANTONIUS, OLSMAN RAYMOND, ANDE CHAITANYA KRISHNA, VAN DEN BOSCH GERRIT, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN JOHANNES JOSEPH, JANSSEN PAUL, VLES DAVID FERDINAND, GIESBERS ADRIANUS JOHANNES MARIA, PATEL HRISHIKESH, VOORTHUIJZEN WILLEM PIETER, MEIJERINK WOUTER ROGIER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, WONDERGEM HENDRIKUS JAN, KLOOTWIJK JOHAN HENDRIK, KURGANOVA EVGENIA, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 09.12.2022
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Year of Publication 09.12.2022
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EUV Membrane for EUV lithography
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 24.12.2021
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Year of Publication 24.12.2021
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펠리클 및 펠리클 조립체
MEIJER MARCEL PETER, PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, ZDRAVKOV ALEXANDAR NIKOLOV, KNAPEN PETER SIMON ANTONIUS, OLSMAN RAYMOND, ANDE CHAITANYA KRISHNA, VAN DEN BOSCH GERRIT, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, JANSSEN JOHANNES JOSEPH, JANSSEN PAUL, VLES DAVID FERDINAND, GIESBERS ADRIANUS JOHANNES MARIA, PATEL HRISHIKESH, VOORTHUIJZEN WILLEM PIETER, MEIJERINK WOUTER ROGIER, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, VAN ZWOL PIETER JAN, WONDERGEM HENDRIKUS JAN, KLOOTWIJK JOHAN HENDRIK, KURGANOVA EVGENIA, VAN DER ZANDE WILLEM JOAN, NOTENBOOM ARNOUD WILLEM, DE GROOT ANTONIUS FRANCISCUS JOHANNES
Year of Publication 12.02.2020
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Year of Publication 12.02.2020
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EUV 리소그래피를 위한 멤브레인
PETER MARIA, NASALEVICH MAXIM ALEKSANDROVICH, VAN DE KERKHOF MARCUS ADRIANUS, BANERJEE NIRUPAM, ZDRAVKOV ALEXANDAR NIKOLOV, VERBURG ANTONIUS WILLEM, BLAUW MICHIEL ALEXANDER, BROUNS DERK SERVATIUS GERTRUDA, VERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS, LENDERINK EGBERT, NIKIPELOV ANDREY, RISPENS GIJSBERT, JANSSEN PAUL, ABEGG ERIK ACHILLES, VLES DAVID FERDINAND, VOORTHUIJZEN WILLEM PIETER, KRUIZINGA MATTHIAS, VAN ZWOL PIETER JAN, PILIEGO CLAUDIA, VAN DER ZANDE WILLEM JOAN, SCHUH NADJA, MAXIM NICOLAE, NOTENBOOM ARNOUD WILLEM
Year of Publication 20.12.2018
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Year of Publication 20.12.2018
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A METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
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Year of Publication 16.02.2022
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Year of Publication 16.02.2022
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A MEMBRANE FOR EUV LITHOGRAPHY
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Year of Publication 28.06.2023
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Year of Publication 28.06.2023
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Optical Membrane
PIETER-JAN VAN ZWOL, MARCUS ADRIANUS VAN DE KERKHOF, VAHID MOHAMMADI, ALEXANDAR NIKOLOV ZDRAVKOV, PAUL JANSSEN, STOYAN NIHTIANOV
Year of Publication 20.02.2020
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Year of Publication 20.02.2020
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A MEMBRANE FOR EUV LITHOGRAPHY
VAN DER ZANDE, Willem, Joan, NIKIPELOV, Andrey, VLES, David, Ferdinand, JANSSEN, Paul, NASALEVICH, Maxim, Aleksandrovich, BROUNS, Derk, Servatius, Gertruda, PÉTER, Mária, VERMEULEN, Johannes, Petrus, Martinus, Bernardus, MAXIM, Nicolae, VERBURG, Antonius, Willem, ABEGG, Erik, Achilles, BANERJEE, Nirupam, LENDERINK, Egbert, ZDRAVKOV, Alexandar, Nikolov, KRUIZINGA, Matthias, PILIEGO, Claudia, NOTENBOOM, Arnoud, Willem, BLAUW, Michiel, Alexander, SCHUH, Nadja, VAN ZWOL, Pieter-Jan, VAN DE KERKHOF, Marcus, Adrianus, RISPENS, Gijsbert, VOORTHUIJZEN, Willem-Pieter
Year of Publication 31.05.2023
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Year of Publication 31.05.2023
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METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
KLOOTWIJK, Johan Hendrik, JANSSEN, Paul, VAN DEN EINDEN, Wilhelmus Theodorus Anthonius Johannes, ZDRAVKOV, Alexandar Nikolov
Year of Publication 27.12.2018
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Year of Publication 27.12.2018
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A METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
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Year of Publication 24.10.2018
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Year of Publication 24.10.2018
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Optical Membrane
PIETER-JAN VAN ZWOL, MARCUS ADRIANUS VAN DE KERKHOF, VAHID MOHAMMADI, ALEXANDAR NIKOLOV ZDRAVKOV, PAUL JANSSEN, STOYAN NIHTIANOV
Year of Publication 20.05.2019
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Year of Publication 20.05.2019
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Optical Membrane
PIETER-JAN VAN ZWOL, MARCUS ADRIANUS VAN DE KERKHOF, VAHID MOHAMMADI, ALEXANDAR NIKOLOV ZDRAVKOV, PAUL JANSSEN, STOYAN NIHTIANOV
Year of Publication 20.05.2019
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Year of Publication 20.05.2019
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Optical Membrane
PIETER-JAN VAN ZWOL, MARCUS ADRIANUS VAN DE KERKHOF, VAHID MOHAMMADI, ALEXANDAR NIKOLOV ZDRAVKOV, PAUL JANSSEN, STOYAN NIHTIANOV
Year of Publication 28.01.2019
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Year of Publication 28.01.2019
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Lithographic apparatus with improved stability
VAN HOOL PAULUS ALBERTUS, MILLON DAVID, VAN DE KERKHOF MARCUS ADRIANUS, ZDRAVKOV ALEXANDAR NIKOLOV
Year of Publication 15.07.2022
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Year of Publication 15.07.2022
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Method of manufacturing diaphragm assembly for extreme ultraviolet lithography, diaphragm assembly, lithographic apparatus, and device manufacturing method
JANSSEN PAUL, ZDRAVKOV ALEXANDAR NIKOLOV, VAN DEN EINDEN WILHELMUS THEODORUS ANTHONIUS JOHANNES, KLOOTWIJK JOHAN HENDRIK
Year of Publication 05.07.2022
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Year of Publication 05.07.2022
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A METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
VAN DEN EINDEN, WILHELMUS THEODORUS ANTHONIUS JOHANNES, ZDRAVKOV, ALEXANDAR NIKOLOV, JANSSEN, PAUL, KLOOTWIJK, JOHAN HENDRIK
Year of Publication 22.06.2017
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Year of Publication 22.06.2017
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A METHOD OF MANUFACTURING A MEMBRANE ASSEMBLY FOR EUV LITHOGRAPHY, A MEMBRANE ASSEMBLY, A LITHOGRAPHIC APPARATUS, AND A DEVICE MANUFACTURING METHOD
ZDRAVKOV, Alexandar, Nikolov, JANSSEN, Paul, KLOOTWIJK, Johan, Hendrik, VAN DEN EINDEN, Wilhelmus, Theodorus, Anthonius, Johannes
Year of Publication 22.06.2017
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Year of Publication 22.06.2017
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