Anin situ method for measuring acid loss from polymer films
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Published in Journal of applied polymer science (09.12.2000)
Published in Journal of applied polymer science (09.12.2000)
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Design and Study of Silicone-based Materials for Bilayer Resist Application
Yamada, Shintaro, Cho, Sungseo, Lee, Jay Hyoung, Zhang, Tao, Zampini, Anthony
Published in Journal of Photopolymer Science and Technology (01.01.2004)
Published in Journal of Photopolymer Science and Technology (01.01.2004)
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COATING COMPOSITIONS FOR USE WITH OVERCOATED PHOTORESIST
KONG LIU, ONGAYI OWENDI, WAYTON GERALD B, JAIN VIPUL, COLEY SUZANNE, ZAMPINI ANTHONY
Year of Publication 27.07.2015
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Year of Publication 27.07.2015
Patent
COATING COMPOSITIONS FOR USE WITH AN OVERCOATED PHOTORESIST
ONGAYI OWENDI, WAYTON GERALD B, JAIN VIPUL, COLEY SUZANNE, LIU CONG, ZAMPINI ANTHONY
Year of Publication 30.11.2010
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Year of Publication 30.11.2010
Patent