High Quality Half-cell Processing Using Thermal Laser Separation
Eiternick, Stefan, Kaule, Felix, Zühlke, Hans-Ulrich, Kießling, Thomas, Grimm, Michael, Schoenfelder, Stephan, Turek, Marko
Published in Energy procedia (01.08.2015)
Published in Energy procedia (01.08.2015)
Get full text
Journal Article
TLS-Dicing for SiC - Latest Assessment Results
Zühlke, Hans Ulrich, Schellenberger, Martin, Belgardt, Christian, Cerezuela Barreto, Mercedes, Lewke, Dirk, Dohnke, Karl Otto
Published in Materials science forum (05.06.2018)
Published in Materials science forum (05.06.2018)
Get full text
Journal Article
Thermal Laser Separation – A Novel Dicing Technology Fulfilling the Demands of Volume Manufacturing of 4H-SiC Devices
Zühlke, Hans Ulrich, Cerezuela Barreto, Mercedes, Schellenberger, Martin, Dohnke, Karl Otto, Lewke, Dirk, Ryssel, Heiner, Bauer, Anton J.
Published in Materials science forum (30.06.2015)
Published in Materials science forum (30.06.2015)
Get full text
Journal Article
Improving electric behavior and simplifying production of Si-based diodes by using thermal laser separation
Koitzsch, Matthias, Lewke, Dirk, Schellenberger, Martin, Pfitzner, Lothar, Ryssel, Heiner, Kolb, Robert, Zuhlke, Hans-Ulrich
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Published in ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference (01.05.2013)
Get full text
Conference Proceeding
TLS-Dicing - An innovative alternative to known technologies
Zuhlke, H.-U., Eberhardt, G., Ullmann, R.
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Published in 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.05.2009)
Get full text
Conference Proceeding
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO MULTIPLE PARTS
ZÜHLKE, Hans-Ulrich, KOITZSCH, Matthias, LEWKE, Dirk, TOBISCH, Alexander
Year of Publication 10.04.2019
Get full text
Year of Publication 10.04.2019
Patent
DETECTOR MODULE, OPTOELECTRONIC IMAGE CAPTURE SYSTEM AND AIRCRAFT FOR IMAGE CAPTURE
ZINTL, Andreas, ZÜHLKE, Hans-Ulrich, KERL, Christian, STELLMACH, Mathias, RIENECKER, Steffen
Year of Publication 26.06.2024
Get full text
Year of Publication 26.06.2024
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO MULTIPLE PARTS
ZÜHLKE, HANS-ULRICH, LEWKE, DIRK, TOBISCH, ALEXANDER, KOITZSCH, MATTHIAS
Year of Publication 01.06.2016
Get full text
Year of Publication 01.06.2016
Patent
Detektormodul, optoelektronisches Bildaufnahmesystem und Flugkörper zur Bildaufnahme
Zintl, Andreas, Stellmach, Mathias, Zühlke, Hans-Ulrich, Rienecker, Steffen, Kerl, Christian
Year of Publication 23.02.2023
Get full text
Year of Publication 23.02.2023
Patent
DETECTOR MODULE, OPTOELECTRONIC IMAGE CAPTURE SYSTEM AND AIRCRAFT FOR IMAGE CAPTURE
ZINTL, Andreas, ZÜHLKE, Hans-Ulrich, KERL, Christian, STELLMACH, Mathias, RIENECKER, Steffen
Year of Publication 23.02.2023
Get full text
Year of Publication 23.02.2023
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO A PLURALITY OF SECTIONS
LEWKE DIRK, TOBISCH ALEXANDER, ZÜHLKE HANS-ULRICH, ALLENSTEIN FRANK, KOITZSCH MATTHIAS
Year of Publication 09.06.2016
Get full text
Year of Publication 09.06.2016
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO MULTIPLE PARTS
ZÜHLKE, HANS-ULRICH, LEWKE, DIRK, TOBISCH, ALEXANDER, KOITZSCH, MATTHIAS
Year of Publication 29.01.2015
Get full text
Year of Publication 29.01.2015
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO A PLURALITY OF SECTIONS
LEWKE, DIRK, ZÜHLKE, HANS-ULRICH, TOBISCH, ALEXANDER, ALLENSTEIN, FRANK, KOITZSCH, MATTHIAS
Year of Publication 01.06.2016
Get full text
Year of Publication 01.06.2016
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO A PLURALITY OF SECTIONS
LEWKE, DIRK, ZÜHLKE, HANS-ULRICH, TOBISCH, ALEXANDER, ALLENSTEIN, FRANK, KOITZSCH, MATTHIAS
Year of Publication 09.04.2015
Get full text
Year of Publication 09.04.2015
Patent
METHOD AND DEVICE FOR SEPARATING A FLAT WORKPIECE INTO A PLURALITY OF SECTIONS
LEWKE, DIRK, ZÜHLKE, HANS-ULRICH, TOBISCH, ALEXANDER, ALLENSTEIN, FRANK, KOITZSCH, MATTHIAS
Year of Publication 29.01.2015
Get full text
Year of Publication 29.01.2015
Patent
검출기 모듈, 광전자 이미지 캡처 시스템 및 이미지 캡처를 위한 비행체
KERL CHRISTIAN, ZUHLKE HANS ULRICH, RIENECKER STEFFEN, ZINTL ANDREAS, STELLMACH MATHIAS
Year of Publication 13.05.2024
Get full text
Year of Publication 13.05.2024
Patent