(Invited) Hafnium Oxide Based CMOS Compatible Ferroelectric Materials
Schroeder, Uwe, Martin, Dominik, Mueller, Johannes, Yurchuk, Ekatarina, Mueller, Stefan, Adelmann, Christoph, Schloesser, Till, van Bentum, Ralf, Mikolajick, Thomas
Published in ECS transactions (15.03.2013)
Published in ECS transactions (15.03.2013)
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