Metal Trench Critical Dimension and Overlay Minor Variation Monitoring Method with Voltage Contrast Inspection
Huang, Lijing, Ni, Qiliang, Gu, Xiaofang, Han, Chao, Yuan, Jiansi
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
Published in 2020 China Semiconductor Technology International Conference (CSTIC) (26.06.2020)
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