Miniaturized Angular Rate Sensor with Laminated Quartz Tuning Fork
Ohtsuka, Takahiro, Inoue, Takahiro, Yoshimatsu, Masahiro, Matsudo, Hideryo, Uehara, Hiroshi, Okazaki, Masanobu
Published in Japanese Journal of Applied Physics (01.05.2006)
Published in Japanese Journal of Applied Physics (01.05.2006)
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Journal Article
SURFACE ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING SURFACE ACOUSTIC WAVE DEVICE
YOSHIMATSU MASAHIRO, EBARA SHUN, HARADA HIDEJI, SHINADA HIROFUMI, TAKEUCHI TOSHIAKI, WATABE HISATAKA
Year of Publication 20.07.2017
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Year of Publication 20.07.2017
Patent