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Year of Publication 29.01.2008
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Year of Publication 29.01.2008
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Micro-actuation element provided with torsion bars
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Year of Publication 11.02.2004
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MICRO MIRROR ELEMENT AND MANUFACTURING METHOD THEREFOR
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Year of Publication 09.08.2007
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Year of Publication 12.07.2007
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Year of Publication 05.07.2007
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Year of Publication 05.07.2007
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Year of Publication 28.06.2007
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Year of Publication 27.06.2007
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XIAOYU MI, MIZUNO YOSHIHIRO, OKUDA HISAO, UEDA TOMOSHI, MATSUMOTO TAKESHI
Year of Publication 14.06.2007
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Year of Publication 14.06.2007
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MICRO MIRROR ELEMENT AND ITS MANUFACTURING METHOD
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Year of Publication 14.06.2007
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Year of Publication 14.06.2007
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