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Year of Publication 25.04.2024
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Year of Publication 25.04.2024
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반도체 프로세싱 중에 자기장들을 형성하기 위한 방법들
SAMANT SUSHIL ARUN, YOSHIDOME GOICHI, RIKER MARTIN LEE, PETHE SHIRISH A, ZHANG FUHONG, KALATHIPARAMBIL KISHOR KUMAR, LEI WEI, KOTHNUR PRASHANTH, TOMKO ANDREW, BANGALORE UMESH SUHAS
Year of Publication 01.02.2024
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Year of Publication 01.02.2024
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PVD TARGET FOR SELF-CENTERING PROCESS SHIELD
YOSHIDOME GOICHI, MILLER KEITH A, RASHEED MUHAMMAD, YOUNG DONNY, HANSON RYAN
Year of Publication 14.02.2018
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Year of Publication 14.02.2018
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더 낮은 막 응력 및 더 낮은 동작 온도를 위해 구성된 3D 프린팅된 챔버 컴포넌트들
VASANTHA BOPANNA ICHETTIRA, YOSHIDOME GOICHI, NARENDRNATH KADTHALA R, KELKAR UMESH M, RAJ GOVINDA
Year of Publication 17.10.2017
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Year of Publication 17.10.2017
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PVD TARGET FOR SELF-CENTERING PROCESS SHIELD
YOSHIDOME GOICHI, MILLER KEITH A, RASHEED MUHAMMAD, YOUNG DONNY, HANSON RYAN
Year of Publication 12.11.2015
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Year of Publication 12.11.2015
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PROCESS KIT AND TARGET FOR SUBSTRATE PROCESSING CHAMBER
YOSHIDOME GOICHI, FLANIGAN MICHAEL ALLEN, PAVLOFF CHRISTOPHER, ALLEN ADOLPH MILLER, SCHEIBLE KATHLEEN
Year of Publication 13.06.2013
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Year of Publication 13.06.2013
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