Integration Technology of 30nm Generation Multi-Level NAND Flash for 64Gb NAND Flash Memory
Donghwa Kwak, Jaekwan Park, Keonsoo Kim, Yongsik Yim, Soojin Ahn, Yoonmoon Park, Jinho Kim, Woncheol Jeong, Jooyoung Kim, Mincheol Park, Byungkwan Yoo, Sangbin Song, Hyunsuk Kim, Jaehwang Sim, Sunghyun Kwon, Byungjoon Hwang, Hyung-kyu Park, Sunghoon Kim, Yunkyoung Lee, Hwagyung Shin, Namsoo Yim, Kwangseok Lee, Minjung Kim, Youngho Lee, Jangho Park, Sangyong Park, Jaesuk Jung, Kinam Kim
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
Published in 2007 IEEE Symposium on VLSI Technology (01.06.2007)
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Conference Proceeding
Smallest Bit-Line Contact of 76nm pitch on NAND Flash Cell by using Reversal PR (Photo Resist) and SADP (Self-Align Double Patterning) Process
Byungjoon Hwang, Jaehwang Shim, Jang-Ho Park, Kwangseok Lee, Sunghyun Kwon, Sang-Yong Park, Yoonmoon Park, Dong-Hwa Kwak, Jaekwan Park, Won-Seong Lee
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
Published in 2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (01.06.2007)
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Conference Proceeding
Method of forming semiconductor device
PARK YOONMOON, LEE JAEHAN, SEONG SEUNGWON, PARK SE-YOUNG, KIM KEONSOO, SIM JAE-HWANG
Year of Publication 03.06.2014
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Year of Publication 03.06.2014
Patent
METHOD OF FORMING SEMICONDUCTOR DEVICE
PARK YOONMOON, LEE JAEHAN, SEONG SEUNGWON, PARK SE-YOUNG, KIM KEONSOO, SIM JAE-HWANG
Year of Publication 27.03.2014
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Year of Publication 27.03.2014
Patent
Semiconductor device with dummy contacts
PARK YOONMOON, LEE JAEHAN, SEONG SEUNGWON, PARK SE-YOUNG, KIM KEONSOO, SIM JAE-HWANG
Year of Publication 03.12.2013
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Year of Publication 03.12.2013
Patent
Semiconductor devices and methods of fabricating the same
PARK YOONMOON, YOON YOUNG-BAE, RAH YOUNGSEOP, KIM KEONSOO, KIM JONG-HYUK
Year of Publication 26.03.2013
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Year of Publication 26.03.2013
Patent
SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
PARK YOONMOON, LEE JAEHAN, SEONG SEUNGWON, PARK SE-YOUNG, KIM KEONSOO, SIM JAE-HWANG
Year of Publication 19.05.2011
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Year of Publication 19.05.2011
Patent
SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
PARK YOONMOON, YOON YOUNG-BAE, RAH YOUNGSEOP, KIM KEONSOO, KIM JONG-HYUK
Year of Publication 17.02.2011
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Year of Publication 17.02.2011
Patent