Tribological approaches to material removal rate during chemical mechanical polishing
Kim, Hong Jin, Jang, Young-Jun, Choi, Jaekwang, Kwon, Byungho, Lee, Kuntak, Ko, Yongsun
Published in Metals and materials international (01.03.2013)
Published in Metals and materials international (01.03.2013)
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Journal Article
Investigation of ultra thin polycrystalline silicon channel for vertical NAND flash
Bio Kim, Seung-Hyun Lim, Dong Woo Kim, Nakanishi, T, Sangryol Yang, Jae-Young Ahn, HanMei Choi, Kihyun Hwang, Yongsun Ko, Chang-Jin Kang
Published in 2011 International Reliability Physics Symposium (01.04.2011)
Published in 2011 International Reliability Physics Symposium (01.04.2011)
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Conference Proceeding
Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same
Jeon, Seulgee, Park, Sangjine, Cho, Byungkwon, Ko, Yongsun, Jeong, Jihoon, Hong, Seongsik
Year of Publication 13.12.2022
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Year of Publication 13.12.2022
Patent
Substrate cleaning apparatus and substrate cleaning method using the same
Lee, Kuntack, Jeon, Hayoung, Ko, Yongsun, Jeong, Jihoon, Lee, Kwangwook, Cho, Yongjhin, Cha, Jihoon, Park, Mihyun
Year of Publication 24.05.2022
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Year of Publication 24.05.2022
Patent
Supercritical drying apparatus and method of drying substrate using the same
Kim, Youngtak, Jeon, Seulgee, Park, Sangjine, Ko, Yongsun, Jeong, Jihoon, Cho, Byung-Kwon
Year of Publication 12.04.2022
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Year of Publication 12.04.2022
Patent
WAFER CLEANING APPARATUS BASED ON LIGHT IRRADIATION AND WAFER CLEANING SYSTEM INCLUDING THE SAME
Jeon, Seulgee, Park, Sangjine, Cho, Byungkwon, Ko, Yongsun, Jeong, Jihoon, Hong, Seongsik
Year of Publication 10.12.2020
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Year of Publication 10.12.2020
Patent
Method and apparatus for plasma etching
Kim, Taeheon, Kim, Kyunghyun, Park, Kijong, Ko, Yongsun, Yang, Jun-Youl, Shin, Jae Jin
Year of Publication 03.03.2020
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Year of Publication 03.03.2020
Patent
Metal etchant compositions and methods of fabricating a semiconductor device using the same
Lin, Chen, Lee, Hyosan, Lee, Kuntack, Kim, Kyoungseob, Ko, Yongsun, Ober, Christopher K, Jeong, Jihoon
Year of Publication 18.12.2018
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Year of Publication 18.12.2018
Patent
Method of treating a layer
Kim, Kwangsu, Mun, ChangSup, Park, Byoung Jae, Kim, Kyunghyun, Ko, Yongsun, Park, Kijong
Year of Publication 13.11.2018
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Year of Publication 13.11.2018
Patent
Method and apparatus for plasma etching
Kim, Taeheon, Kim, Kyunghyun, Park, Kijong, Ko, Yongsun, Yang, Jun-Youl, Shin, Jae Jin
Year of Publication 09.10.2018
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Year of Publication 09.10.2018
Patent
Apparatus and methods for treating a substrate
Cho, Yong-Jhin, Lee, Hyosan, Kim, Kwangsu, Lee, Kuntack, Kim, Kyoungseob, Kim, SeokHoon, Jun, Yongmyung, Ko, Yongsun
Year of Publication 23.07.2019
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Year of Publication 23.07.2019
Patent
METHOD AND APPARATUS FOR PLASMA ETCHING
Shin Jae Jin, Yang Jun-Youl, Kim Kyunghyun, Kim Taeheon, Park Kijong, Ko Yongsun
Year of Publication 12.04.2018
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Year of Publication 12.04.2018
Patent
Method and apparatus for purifying cleaning agent
Jun Yongmyung, Lee Kuntack, Lee Hyosan, Oh Jung-Min, Ko Yongsun, Cho Yong-Jhin
Year of Publication 03.04.2018
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Year of Publication 03.04.2018
Patent
Magneto-resistance random access memory device and method of manufacturing the same
Lee Wonjun, Hwang Inseak, Han Yoonsung, Shin Hyunchul, Bae Jinhye, Lee Changkyu, Han Shinhee, Ko Yongsun
Year of Publication 15.08.2017
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Year of Publication 15.08.2017
Patent
METHOD AND APPARATUS FOR PLASMA ETCHING
Shin Jae Jin, Yang Jun-Youl, Kim Kyunghyun, Kim Taeheon, PARK Kijong, Ko Yongsun
Year of Publication 20.07.2017
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Year of Publication 20.07.2017
Patent