Spectrum imaging measurements with semi-parallel detection using an AES apparatus
Taguchi, Noboru, Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Tsutsumi, Kenichi
Published in Ultramicroscopy (01.03.2022)
Published in Ultramicroscopy (01.03.2022)
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Journal Article
New Spectrum Imaging Method for Solid Surfaces with Secondary Electrons acquired over Wide Energy Range (>1000 eV)
Uchida, Tatsuya, Ikita, Konomi, Tanaka, Akihiro, Tsutsumi, Kenichi, Ikeo, Nobuyuki, Yokouchi, Kazushiro, Taguchi, Noboru, Tanaka, Shingo
Published in 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (24.07.2023)
Published in 2023 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) (24.07.2023)
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Conference Proceeding
Charged Particle Beam Apparatus
Ikita, Konomi, Uchida, Tatsuya, Tsutsumi, Kenichi, Ikeo, Nobuyuki, Yokouchi, Kazushiro
Year of Publication 28.09.2023
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Year of Publication 28.09.2023
Patent
CHARGED PARTICLE BEAM APPARATUS
YOKOUCHI, Kazushiro, TSUTSUMI, Kenichi, UCHIDA, Tatsuya, IKITA, Konomi, IKEO, Nobuyuki
Year of Publication 27.09.2023
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Year of Publication 27.09.2023
Patent
Analysis method and analysis apparatus
Uchida, Tatsuya, Tsutsumi, Kenichi, Tanaka, Shingo, Tanaka, Akihiro, Yokouchi, Kazushiro, Taguchi, Noboru
Year of Publication 11.07.2023
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Year of Publication 11.07.2023
Patent
SURFACE ANALYSIS DEVICE AND SPECIMEN HEIGHT ADJUSTMENT METHOD
YOKOUCHI, Kazushiro, TSUTSUMI, Kenichi, UCHIDA, Tatsuya, SHIMAMURA, Daisuke
Year of Publication 19.02.2020
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Year of Publication 19.02.2020
Patent
Analysis Method and Analysis Apparatus
Uchida, Tatsuya, Tsutsumi, Kenichi, Tanaka, Shingo, Tanaka, Akihiro, Yokouchi, Kazushiro, Taguchi, Noboru
Year of Publication 01.04.2021
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Year of Publication 01.04.2021
Patent
SURFACE ANALYSIS DEVICE AND SPECIMEN HEIGHT ADJUSTMENT METHOD
YOKOUCHI, Kazushiro, TSUTSUMI, Kenichi, UCHIDA, Tatsuya, SHIMAMURA, Daisuke
Year of Publication 23.01.2019
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Year of Publication 23.01.2019
Patent