Comparison of Cobalt Integration with Various Dielectric Materials under Thermal and Electrical Stress
Cheng, Yi-Lung, Huang, Hong-Chang, Peng, Wei-Fan, Chen, Giin-Shan, Fang, Jau-Shiung
Published in Coatings (Basel) (01.10.2023)
Published in Coatings (Basel) (01.10.2023)
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Journal Article
Effect of moisture on electrical properties and reliability of low dielectric constant materials
Cheng, Yi-Lung, Leon, Ka-Wai, Huang, Jun-Fu, Chang, Wei-Yuan, Chang, Yu-Min, Leu, Jihperng
Published in Microelectronic engineering (01.02.2014)
Published in Microelectronic engineering (01.02.2014)
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Journal Article
Effect of H2/He plasma treatment on porous low dielectric constant materials
Cheng, Yi-Lung, Haung, Chiao-Wei, Hung, Wei-Jie, Sun, Chung-Ren, Lee, Wen-Hsi
Published in Surface & coatings technology (25.12.2016)
Published in Surface & coatings technology (25.12.2016)
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Journal Article
Correlation between crystallinity and resistive switching behavior of sputtered WO3 thin films
Dao, Thi Bang Tam, Pham, Kim Ngoc, Cheng, Yi-Lung, Kim, Sang Sub, Phan, Bach Thang
Published in Current applied physics (01.12.2014)
Published in Current applied physics (01.12.2014)
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Journal Article
Synergistic enhancement of adhesion and electromigration reliability of cobalt via super-diluted (0.06 at.%) tungsten alloying as next-generation interconnect materials
Fang, Jau-Shiung, Su, Ting-Hsun, Cheng, Yi-Lung, Chen, Giin-Shan
Published in Microelectronics and reliability (01.07.2024)
Published in Microelectronics and reliability (01.07.2024)
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Journal Article
Understanding electromigration failure behaviors of narrow cobalt lines and the mechanism of reliability enhancement for extremely dilute alloying of manganese oxide
Fang, Jau-Shiung, Chen, Giin-Shan, Chang, Chin-Chia, Hsiao, Chien-Nan, Chen, Wei-Chun, Cheng, Yi-Lung
Published in Journal of alloys and compounds (05.01.2024)
Published in Journal of alloys and compounds (05.01.2024)
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Journal Article
Comparison of various low dielectric constant materials
Cheng, Yi-Lung, Lee, Chih-Yen, Hung, Wei-Jie, Chen, Giin-Shan, Fang, Jau-Shiung
Published in Thin solid films (30.08.2018)
Published in Thin solid films (30.08.2018)
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Journal Article
Chemical-Structure Evolution Model for the Self-Assembling of Amine-Terminated Monolayers on Nanoporous Carbon-Doped Organosilicate in Tightly Controlled Environments
Fang, Jau-Shiung, Yang, Tzu-Ming, Pan, Yen-Chang, Lai, Guan-Yu, Cheng, Yi-Lung, Chen, Giin-Shan
Published in Langmuir (15.12.2020)
Published in Langmuir (15.12.2020)
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Journal Article
Comparison of Cu and Co Integration with Porous Low-k SiOCH Dielectrics
Cheng, Yi-Lung, Huang, Hong-Chang, Lee, Chih-Yen, Chen, Giin-Shan, Fang, Jau-Shiung
Published in Thin solid films (30.06.2020)
Published in Thin solid films (30.06.2020)
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