ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION
Kohli, Sandeep, Kanarov, Viktor, Druz, Boris L, Fang, Xingjie, Yevtukhov, Yuriy N
Year of Publication 10.06.2021
Get full text
Year of Publication 10.06.2021
Patent
ENHANCED CATHODIC ARC SOURCE FOR ARC PLASMA DEPOSITION
Kanarov Viktor, Kohli Sandeep, Yevtukhov Yuriy N, Fang Xingjie, Druz Boris L
Year of Publication 28.12.2017
Get full text
Year of Publication 28.12.2017
Patent