Abnormally enhanced dielectric constant in ZrO2/Ta2O5 multi-laminate structures by metallic Ta formation
Cho, Hyunchol, Park, Kyung-Woong, Park, Cheol Hwan, Cho, Ho Jin, Yeom, Seung-Jin, Hong, Kwon, Kwak, Noh-Jung, Ahn, Ji-Hoon
Published in Materials letters (01.09.2015)
Published in Materials letters (01.09.2015)
Get full text
Journal Article
Random-Oriented (Bi,La) 4 Ti 3 O 12 Thin Film Deposited by Pulsed-DC Sputtering Method on Ferroelectric Random Access Memory Device
Lee, Youn-Ki, Ryu, Sung-Lim, Kweon, Soon-Yong, Yeom, Seung-Jin, Kang, Hee-Bok
Published in Transactions on electrical and electronic materials (2011)
Get full text
Published in Transactions on electrical and electronic materials (2011)
Journal Article
The characteristics of Cu-drift induced dielectric breakdown under alternating polarity bias temperature stress
Sung-Yup Jung, Byoung-Joon Kim, Nam Yeal Lee, Baek-Mann Kim, Seung Jin Yeom, Noh Jung Kwak, Young-Chang Joo
Published in 2009 IEEE International Reliability Physics Symposium (01.04.2009)
Published in 2009 IEEE International Reliability Physics Symposium (01.04.2009)
Get full text
Conference Proceeding
Bias polarity and frequency effects of Cu-induced dielectric breakdown in damascene Cu interconnects
Jung, Sung-Yup, Kim, Byoung-Joon, Lee, Nam Yeal, Kim, Baek-Mann, Yeom, Seung Jin, Kwak, Noh Jung, Joo, Young-Chang
Published in Microelectronic engineering (2012)
Published in Microelectronic engineering (2012)
Get full text
Journal Article
Conference Proceeding
Conformal electroless deposition of Cu seed layer on a 60-nm trench pattern modified with a self-assembled monolayer
Han, Won-Kyu, Hwang, Gil-Ho, Hong, Seok-Jun, Kim, Soo-Seok, Yoon, Chong-Seung, Kwak, Noh-Jung, Yeom, Seung-Jin, Kim, Jae-Hong, Kang, Sung-Goon
Published in Microelectronic engineering (01.03.2009)
Published in Microelectronic engineering (01.03.2009)
Get full text
Journal Article
EFFECTS OF CRYSTALLIZATION ANNEALING SEQUENCE FOR SrBi2Ta2O9 (SBT) FILM ON Pt/SBT INTERFACE MORPHOLOGY AND ELECTRICAL PROPERTIES OF FERROELECTRIC CAPACITOR
Yang, W S, Yeom, S J, Kim, N K, Kweon, S Y, Roh, J S
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5465-5468. 2000 (2000)
Published in Jpn.J.Appl.Phys ,Part 1. Vol. 39, no. 9B, pp. 5465-5468. 2000 (2000)
Get full text
Journal Article
Theoretical Calculation and Experimental Verification of the Hf/Al Concentration Ratio in Nano-mixed $Hf_xAl_yO_z$ Films Prepared by Atomic Layer Deposition
Kil, Deok-Sin, Yeom, Seung-Jin, Hong, Kwon, Roh, Jae-Sung, Sohn, Hyun-Cheol, Kim, Jin-Woong, Park, Sung-Wook
Published in Journal of semiconductor technology and science (2005)
Get full text
Published in Journal of semiconductor technology and science (2005)
Journal Article
SEMICONDUCTOR DEVICE WITH AIR GAP AND METHOD FOR FABRICATING THE SAME
HONG, SEUNG HEE, LEE, HYO SEOK, YEOM, SEUNG JIN, LIM, SUNG WON, LEE, NAM YEAL
Year of Publication 23.10.2014
Get full text
Year of Publication 23.10.2014
Patent