Rapid crystallization of amorphous silicon utilizing a very-high-frequency microplasma jet for Si thin-film solar cells
Saha, Jhantu Kumar, Haruta, Koji, Yeo, Mina, Koabayshi, Tomohiro, Shirai, Hajime
Published in Solar energy materials and solar cells (01.06.2009)
Published in Solar energy materials and solar cells (01.06.2009)
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Conference Proceeding
Very-high-frequency thermal microplasma jet for the rapid crystallization of amorphous silicon
Shirai, Hajime, Sakurai, Yusuke, Yeo, Mina, Haruta, Koji, Kobayashi, Tomohiro, Ishikawa, Tatsuo
Published in Thin solid films (01.05.2008)
Published in Thin solid films (01.05.2008)
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Rapid recrystallization of amorphous silicon utilizing the plasma jet at atmospheric pressure
Sakurai, Yusuke, Yeo, Mina, Shirai, Hajime, Kobayashi, Tomohiro, Hasegawa, Yasuhiro
Published in Journal of non-crystalline solids (15.06.2006)
Published in Journal of non-crystalline solids (15.06.2006)
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Conference Proceeding