Optimization of low-k dielectric (fluorinated SiO/sub 2/) process and evaluation of yield impact by using BEOL test structures
Sunnys Hsieh, Doong, K.Y.-Y., Yen-Hsuan Ho, Sheng-Che Lin, Binson Shen, Sing-Mo Tseng, Yeu-Haw Yang, Hsu, C.C.-H.
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
Published in ICMTS 2000. Proceedings of the 2000 International Conference on Microelectronic Test Structures (Cat. No.00CH37095) (2000)
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